- Title
- Position sensor performance in nanometer resolution feedback systems
- Creator
- Fleming, Andrew J.
- Relation
- 6th IFAC Symposium on Mechatronic Systems . Proceedings of the 6th IFAC Symposium on Mechatronic Systems (Hangzhou, China 10-12 April, 2013)
- Relation
- ARC.DP0986319
- Publisher Link
- http://dx.doi.org/10.3182/20130410-3-CN-2034.00010
- Publisher
- IFAC
- Resource Type
- conference paper
- Date
- 2013
- Description
- The performance of precision mechatronic systems is restrained by the linearity, bandwidth and resolution of position sensors. Unfortunately, these parameters may not be available in a form that allows direct comparison between sensors or the prediction of closed-loop performance. This article presents concise definitions for the linearity, drift, bandwidth and resolution of position sensors. These definitions allow position sensors to be readily compared and the performance of feedback systems to be accurately predicted.
- Subject
- microsystems; nanosystems; motion control; actuator and sensor systems; position sensors; nanopositioning
- Identifier
- http://hdl.handle.net/1959.13/1063036
- Identifier
- uon:17192
- Identifier
- ISBN:9783902823311
- Identifier
- ISSN:1474-6670
- Language
- eng
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